基于等离激元多重杂化效应的光吸收结构

杨帅; 毛海央; 鲍爱达; 郭鑫; 李锐锐; 杨宇东; 石梦; 陈大鹏

doi:10.7498/aps.70.20201512

摘要

近年来, 以聚合物为代表的高分子材料由于具有比其他光吸收材料(如半导体材料、碳基材料以及贵金属纳米材料)更好的柔性和粘弹性而受到广泛关注. 本文基于等离子体再聚合技术和磁控溅射工艺在聚合物材料层上制备了具有等离激元多重杂化效应的光吸收结构, 该结构具有宽谱高吸收特性. 该结构的制备工艺简单易行, 对不同聚合物材料具有通用性, 在光学器件领域具有广泛的应用前景.

关键词:

等离子体再聚合 /
复合纳米森林结构 /
光吸收结构 /
等离激元多重杂化

Abstract

In recent years, the polymers represented by macromolecular materials have attracted widespread attention due to their higher flexibility and viscoelastic, compared with other materials used for light absorption (such as semiconductor materials, carbon-based materials and noble metal nanomaterials). Although the polymers have shown potential applications in the photothermal field, compared with other light-absorbing materials, the polymer substrates have a low light absorption rate and a narrow absorption bandwidth concentrated in the visible light band. Therefore, it is necessary to prepare a structure on the polymer material layer for absorbing light, thereby improving the ability of the polymer to absorb light. In addition, since the existing preparation processes of polymer absorption structures require the use of templates and the processes are relatively complicated, there is an urgent need for a simple and easy process to prepare the absorption structures on the polymer material layer. In this article, composite nanoforests are prepared on polymer substrates based on a plasma repolymerization technology and magnetron sputtering process; due to the metallic nanoparticles existing, multi-hybrid plasmonic effect is achieved, thus the average light absorption rate of the polymer in a wavelength range of 380–2500 nm is increased from 23.34% to 74.56%. Such polymer composite nanoforests have high absorption characteristics in a wide spectral range. The method of preparing the structure is quite simple, and can be applied to preparing different polymer materials. Besides, by changing the plasma bombardment time, the morphology of the nanoforests can be adjusted; by increasing the size of the metallic nanoparticles, the absorption of the composite nanoforests can be increased. It is foreseeable that the polymer composite nanoforests will have applications in various optical devices.

Keywords:

plasma repolymerization /
composite nanoforests /
light absorbing structures /
plasmon multi-hybrid

作者及机构信息

杨帅^1,2,
毛海央^2,3,
鲍爱达¹,
郭鑫¹,
李锐锐^1,2,
杨宇东²,
石梦²,
陈大鹏²

1.
中北大学仪器与电子学院, 太原　030051

2.
中国科学院微电子研究所, 集成电路先导工艺研发中心, 北京　100029

3.
江苏创芯海微科技有限公司, 无锡　214001

通信作者: 毛海央, maohaiyang@ime.ac.cn ; 鲍爱达, baoaida@nuc.edu.cn ;

基金项目: 国家自然科学基金(批准号: 61771467)、广东省重点领域研发计划(批准号: 2019B010117001)和中国科学院青促会项目(批准号: 2018153)资助的课题.

Authors and contacts

Yang Shuai^1,2,
Mao Hai-Yang^2,3,
Bao Ai-Da¹,
Guo Xin¹,
Li Rui-Rui^1,2,
Yang Yu-Dong²,
Shi Meng²,
Chen Da-Peng²

1.
College of Instrumentation and Electronics, North University of China, Taiyuan 030051, China

2.
Integrated Circuit Advanced Process Center, Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China

3.
Jiangsu Hinovaic Technologies Co., Ltd., Wuxi 214001, China

Corresponding author: Mao Hai-Yang, maohaiyang@ime.ac.cn ; Bao Ai-Da, baoaida@nuc.edu.cn ;

Funds: Project supported by the National Natural Science Foundation of China (Grant No. 61771467), the High Technology Research and Development Project of Guangdong Province, China (Grant No. 2019B010117001), and the Youth Innovation Promotion Association, Chinese Academy of Sciences, China (Grant No. 2018153).

文章全文 : translate this paragraph

参考文献

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施引文献

图 1 在PI表面上制备纳米纤维森林结构的工艺流程及各步骤所获得结构的SEM图　(a) 未经处理的PI表面SEM图; (b) 30 min氧等离子体轰击后PI表面的SEM图; (c) 30 min氩等离子体轰击后PI表面的SEM图; (d) 30 min氧和30 min氩等离子体依次轰击后PI表面的SEM图

Fig. 1. Preparation process and SEM images of nanofiber forests on the surface of PI substrate: (a) SEM image of untreated PI surface; (b) SEM image of PI surface bombarded by 30 min oxygen plasma; (c) SEM image of PI surface bombarded by 30 min argon plasma; (d) SEM image of PI surface bombarded by 30 min oxygen and 30 min argon plasma.

下载: 全尺寸图片幻灯片

图 2 纳米纤维森林结构的平均高度与氧等离子体轰击时间之间的关系曲线

Fig. 2. The plot of the average height of nanofiber forests at different etching time of oxygen plasma.

下载: 全尺寸图片幻灯片

图 3 复合纳米森林光吸收结构的制备工艺流程　(a)纳米纤维森林结构; (b) 材料层背面溅射金纳米薄膜层; (c)纳米纤维森林结构表面溅射金纳米颗粒

Fig. 3. Preparation process of the composite nanoforests: (a) Nanofiber forests; (b) Au nanofilm sputtering on the back; (c) Au nanoparticle sputtering on surface of the composite nanoforests.

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图 4 复合纳米森林光吸收结构表面100个金纳米颗粒尺寸分布直方图(插图为金纳米颗粒分布SEM照片)

Fig. 4. The size distribution histogram of 100 gold nanoparticles on surface of the composite nanoforests (inset shows the gold nanoparticle distribution around a nanofiber).

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图 5 具有不同高度纳米纤维森林结构的PI材料层的吸收谱图(插图为不同时间氧等离子体轰击后PI表面的SEM照片)

Fig. 5. Absorption spectra and the SEM images (inset) of PI nanofiber forests with different heights.

下载: 全尺寸图片幻灯片

图 6 PI光吸收结构的吸收谱图　(a) 不同时间氧等离子体轰击后的PI复合纳米森林结构的光吸收率; (b)不同PI光吸收结构的光吸收率

Fig. 6. Absorption spectra of PI: (a) Composite nanoforests after different periods of bombardment; (b) different structures.

下载: 全尺寸图片幻灯片

图 7 表面分布着不同粒径尺寸金纳米颗粒的PI复合纳米森林结构光吸收率　(a) 吸收谱图; (b) 光吸收率与金纳米颗粒粒径之间的关系曲线(插图为SEM图及样品照片)

Fig. 7. Absorption rate of PI composite nanoforests with gold nanoparticles of different sizes: (a) Absorption spectra; (b) the change curve of light absorption rate of nanoforests with gold nanoparticles of different sizes (insets show images of the sample).

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图 8 相同工艺条件下不同聚合物光吸收结构的吸收谱图　(a)制备纳米纤维森林结构前不同聚合物的吸收谱; (b)制备了复合纳米森林结构后的不同聚合物的吸收谱(插图为SEM照片)

Fig. 8. Absorption spectra of different polymers: (a) Without nanoforests; (b) with composite nanoforests (inset show the corresponding SEM images).

下载: 全尺寸图片幻灯片

图 9 三种聚合物在表面制备复合纳米森林结构前后光吸收率的对比

Fig. 9. Light absorption curves of three polymers before and after preparation of composite nanoforests.

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图 10 不同结构的电磁场增强FDTD仿真分析　(a) 基底表面电磁场分布; (b) 纳米纤维森林结构周围的电磁场分布; (c) 复合纳米森林结构周围的电磁场分布

Fig. 10. FDTD simulation analysis of different structures: (a) Distribution of electric field on the substrate surface; (b) distribution of electric field around a nanofiber; (c) distribution of electric field around a composite nanofiber.

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[17]	Zhu L, Gao M, Peh C K N, Wang X, Ho G W 2018 Adv. Energy Mater. 6 14571 Google Scholar
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[19]	Li C, Jiang D, Huo B, Ding M, Huang C, Jia D 2019 Nano Energy 60 841 Google Scholar
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[23]	Cao Y, Du P, Qiao Y 2014 Appl. Phys. Lett. 105 153902.1
[24]	Lv Y, Cai B, Wu Y, Wang S, Jiang Q, Ma Q 2018 Journal of Energy Chemistry 27 951
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[29]	Han K M, Cho J S, Yoo J 2015 Vacuum 115 85 Google Scholar
[30]	Linbao L, Di W, Chao X, Jigang H, Xingyuan Z, Fengxia L 2019 Adv. Funct. Mater. 29 1900849 Google Scholar
[31]	Meng L, Zhang Y, Yam C Y 2017 J. Phys. Chem. Lett. 8 571 Google Scholar
[32]	Shalchian M, Grisolia J, Assayag G B, Coffin H, Atarodi S M, Claverie A 2005 Appl. Phys. Lett. 86 163111 Google Scholar
[33]	Park Y, Berger J, Tang Z, Mueller-Meskamp L, Lasagni A F, Vandewal K 2016 Appl. Phys. Lett. 109 093301 Google Scholar
[34]	Yu A, Bumai N I, Dolgikh A A, Kharchenko V F, Valeev V I, Nuzhdin R I 2014 J. Appl. Spectrosc. 81 188 Google Scholar
[35]	Gesquiere A J 2010 J. Am. Chem. Soc. 132 400
[36]	Thongrattanasiri S, Koppens F H L, Abajo F J G D 2012 Phys. Rev. Lett. 108 047401 Google Scholar
[37]	Duan H G, Fernández-Domínguez A I, Bosman M 2012 Nano Lett. 12 1683 Google Scholar
[38]	Hu Y, LaPierre R R, Li M 2012 J. Appl. Phys. 112 104311 Google Scholar
[39]	Kim S K, Ee H S, Choi W, Kwon S H, Kang J H, Kim Y H 2011 Appl. Phys. Lett. 98 011109 Google Scholar
[40]	Hillenbrand R, Taubner T, Keilmann F 2002 Nature 418 159 Google Scholar
[41]	Zhou L, Tan Y, Ji D, Zhu B, Zhang P, Xu J 2016 Sci. Adv. 2 e1501227 Google Scholar
[42]	Zhou L, Tan Y, Wang J 2016 Nat. Photonics 10 393 Google Scholar
[43]	Liang J, Liu H, Yu J, Zhou L, Zhu J 2019 Nanophotonics 8 771 Google Scholar

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基于等离激元多重杂化效应的光吸收结构